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4 RV3, RV5, RV8 and RV12 Rotary Vane Pumps 1.3 Description The Edwards RV rotary vane pump is shown in Figure 1. Refer to Figure 1 for item numbers in brackets in the following descriptions. Th e RV pumps are two-stage, oil-sealed, sliding-vane vacuum pumps. The pump has NW25 inlet (4) and outlet (7) ports, a gas-ballast control (5)
APPLICATIONS The TCU 40/80 Plus Temperature Control Unit is a single channel chiller which supplies perfluorocarbon coolant in a closed loopfor temperature control of semiconductor process chambers and wafers during etch and other processes.It is designed for relia- bility,up-time performance,and ease of maintenance,providing continuous and trouble free cooling across a wide temperature range .
APPLICATIONS The TCU 40/80 Plus Temperature Control Unit is a single channel chiller which supplies perfluorocarbon coolant in a closed loopfor temperature control of semiconductor process chambers and wafers during etch and other processes.It is designed for relia- bility,up-time performance,and ease of maintenance,providing continuous and trouble free cooling across a wide temperature range .
Vacuum Pump Repair Kits Adixen Vacuum Pump Maintenance Kits Adixen "I" Series Vacuum Pump Maintenance Kits BOC Edwards Vacuum Pump Maintenance Kits Kits for Leybold, Precision, Varian, and Welch Pump Parts by Manufacturer (Large Selection; Precision) Pump Temperature Indicators Diffusion Pump Accessories
QDP Drystar® Vacuum Pumps Description Item Number QDP40 Drystar Pump A528-40-905 QDP80 Drystar Pump (4 kW) A528-79-905 . operation and maintenance instructions for the BOC Edwards QDP Drystar Vacuum Pumps, abbreviated to QDP pumps in the remainder of this . manual. You must use the pumps as specified in this manual.
Edwards APG100-XLC NW25 Corrosion resistant Active Pirani Vacuum Gauge, D02604000, APG 100-XLC, Edwards APG-100-XLC Gauge, Edwards APG 100 -XLC, Edwards APG 100 -XLCGauge, APG 100 -XLC Gauge, APG-100-XLC Guage, APG-100-XLC Vacuum Gauge, Edwards Gauge repair, Edwards Gauge service, Edwards Gauge set, Edwards measurement set, gauge with controller, Edwards vacuum gauge, Edwards gauge vacuum .
Instruction Manual E1M18 and E2M18 Rotary Vacuum Pumps Description Item Number E1M18, 100/200 V, 50 Hz or 100-105/200-210 V, 60 Hz, single-phase A343-15-904 . RETURN OF BOC EDWARDS EQUIPMENT CONTENTS (CONTINUED) . Edwards E1M18 and E2M18 rotary vacuum pumps.
The units used throughout this manual conform to the SI international system of units of measurement. 1.2 Description 1.2.1 General BOC Edwards QMB Mechanical Booster Pumps are compact and have high pumping speeds. Low system pressures can be achieved by using two or more mechanical booster pumps in series.
the event of a power failure or when the pump is shut down without vacuum being broken. The pump general arrangements are provided in Figures 2 and 3. 1.3.1 Gas ballast To pump high vapour loads, gas ballast is delivered into the pump to prevent condensation of the vapour carried by the pump gases. Air can be introduced to the low vacuum stage.
iH Dry Pumping Systems - Setup Password The setup password for this equipment is preset as follows: SETUP PASSWORD: 202 You can remove this sheet from the instruction manual and retain it in a safe place to prevent unauthorised access to the setup
Instruction Manual E1M18 and E2M18 Rotary Vacuum Pumps Description Item Number E1M18, 100/200 V, 50 Hz or 100-105/200-210 V, 60 Hz, single-phase A343-15-904 . RETURN OF BOC EDWARDS EQUIPMENT CONTENTS (CONTINUED) . Edwards E1M18 and E2M18 rotary vacuum pumps.
Edwards Vacuum AGC Active Gauge Controller, Single Display, D38655000, for Active Pirani APG-M, APG-L, Magnetron AIM-S, AIM-X, Active Thermocouple ATC-M, ATC-D with ATC-E,Active Ion Gauge IGC-I2R,, Active Strain Gauge ASG Wide Range Gauge WRG, D3866
Get the best deals on Edwards Other Vacuum Pumps when you shop the largest online selection at . Free shipping on many items . BOC Edwards Vacuum Pump Nw40 Aluminum Elbow C10516410. . Edwards Gate Valve GVI B65401000 ISO160 Manual Gate Valve. 500.00. Brand: Edwards. 51.45 shipping. or Best Offer.
With over 450 vacuum pumps to choose from, the KJLC ® Vacuum Pump Selection Guide is designed to help you find one that meets your vacuum requirements. You can narrow down our pump offering by simply choosing from a list of different search criteria.
The XDS pump is a compact, reliable vacuum pump which is suitable for use on vapour handling processes. The XDS pump may be used for some pumping applications involving corrosive substances and particulates; for information on pumping flammable gases, please refer to Section 4.5 and contact BOC Edwards for any further assistance.
Edwards iH160 Semiconductor Dry Vacuum Pump - NEW. Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.
Pumps, vacuum; BOC Edwards; For centrifugal concentrators/rotary evaporators; Rotary vane pump requires oil; Model RV8; Air displacement: 195L/min.; Oil capacity: 0 .
Water Pump; RV12; Edwards RV12 Manuals Manuals and User Guides for Edwards RV12. We have 5 Edwards RV12 manuals available for free PDF download: . The Vacuum Is Not Fully Maintained After the Pump Is Switched Off. 46. The Pumping Speed Is Poor. 46. There Is an External Oil Leak. 47. 6 Storage and Disposal. 47. Storage. 47.
Edwards APG100-XLC NW25 Corrosion resistant Active Pirani Vacuum Gauge, D02604000, APG 100-XLC, Edwards APG-100-XLC Gauge, Edwards APG 100 -XLC, Edwards APG 100 -XLCGauge, APG 100 -XLC Gauge, APG-100-XLC Guage, APG-100-XLC Vacuum Gauge, Edwards Gauge repair, Edwards Gauge service, Edwards Gauge set, Edwards measurement set, gauge with controller, Edwards vacuum gauge, Edwards gauge vacuum .
Edwards is a leading developer and manufacturer of sophisticated vacuum products, abatement solutions and related value-added services. 1 – 30 of Products Industries
The units used throughout this manual conform to the SI international system of units of measurement. 1.2 Description 1.2.1 General BOC Edwards QMB Mechanical Booster Pumps are compact and have high pumping speeds. Low system pressures can be achieved by using two or more mechanical booster pumps in series.
1 INTRODUCTION 1.1 Scope and definitions This manual provides installation, operation and maintenance instructions for the BOC Edwards E1M175S, E1M275S, E2M175S, and E2M275S Rotary Vacuum Pumps.
E2M0.7, E2M1 and E2M1.5 Rotary Vacuum Pumps INTRODUCTION PAGE 1 Issue A 1 02/06/05 1 INTRODUCTION 1.1 Scope and definitions This manual provides installation, operation and maintenance instructions for the BOC Edwards E2M0.7, E2M1 and E2M1.5 rotary vacuum pumps. You must use the pump as specified in this manual. Read this
Edwards Seiko Seiki STP-A1303C Turbomolecular Vacuum Pump - REBUILT. Edwards STP-A1303C is a turbomolecular pump designed for use in semiconductor applications. Edwards advanced rotor technology gives class-leading performance for maximum process flexibility. . BOC Edwards STP Series Generic Instruction Manual. Digital Manual. Request for Quote.
Part of the family of the BOC Edwards XDS Dry pump,the XDS35i provides a clean,dry vacuum,totally free of lubricants for non-hazardous applications.The bearings are isolated from the vacuum environment by a patented bearing shield. Uniquely, there are no bearings, grease or oil under vacuum and no bearing purge is required.
Speed: 59 ft 3 min-1(cfm) Overview: The BOC Edwards IPX100 Dry Pump is a vacuum pump designed for use on load lock and transfer applications. The pump is cleanroom compatible. So it can be located close to the process tool– eliminating the need for a long vacuum foreline and saving sub-fab space.
The pHMB Proximity Booster pump is a water-cooled, positive displacement Roots vacuum pump driven through an a.c. inverter. The pHMB pumping system is automatically controlled by either the BOC Edwards backing pump or BOC Edwards System Controller. The status of the system can be monitored through the LED's at the rear of the pump:-
Edwards RV3 Vacuum Pump with Sonation Noise Reduction Box. Manufacturer: Edwards Weight: 25 Kg / 55 lbs The RV3 series of small oil sealed rotary vane pumps deliver excellent ultimate vacuum pressure, high pumping speeds and superior vapor handling capabilities with quiet operation.
Part of the family of the BOC Edwards XDS Dry pump,the XDS35i provides a clean,dry vacuum,totally free of lubricants for non-hazardous applications.The bearings are isolated from the vacuum environment by a patented bearing shield. Uniquely, there are no bearings, grease or oil under vacuum and no bearing purge is required.
E2M0.7 And E2M1.5 Rotary Vacuum Pump Instruction Manual To remove the handle, cut the handle into two and remove the free portions from the pump. 3.5 Fill the pump with oil Fill the pump with oil as When you maintain the pump, use BOC Edwards spares and maintenance kits; these contain all of the components necessary to complete maintenance .